Methods of forming microelectronic devices, and related microelectronic devices and electronic systems

ABSTRACT

A method of forming a microelectronic device comprises forming a microelectronic device structure comprising a base structure; a doped semiconductive material overlying the base structure; a stack structure overlying the doped semiconductive material; semiconductive structures extending from within the base structure, through the doped semiconductive structure, and into a lower portion of the stack structure; cell pillar structures horizontally aligned with the semiconductive structures and vertically extending through an upper portion of the stack structure; and digit line structures vertically overlying the stack structure. An additional microelectronic device structure comprising control logic devices is formed. The microelectronic device structure is attached to the additional microelectronic device structure to form an assembly. The base structure and portions of the semiconductive structures are removed. The doped semiconductive material is then patterned to form at least one source structure coupled to the cell pillar structures. Devices and systems are also described.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is related to U.S. patent application Ser. No. ______(attorney docket No. 2269-P15363US), filed on even date herewith,listing Kunal R. Parekh as inventor, for “MICROELECTRONIC DEVICES, ANDRELATED METHODS, MEMORY DEVICES, AND ELECTRONIC SYSTEMS.” Thisapplication is also related to U.S. patent application Ser. No. ______(attorney docket No. 2269-P15380US), filed on even date herewith,listing Kunal R. Parekh as inventor, for “METHODS OF FORMINGMICROELECTRONIC DEVICES, AND RELATED MICROELECTRONIC DEVICES, MEMORYDEVICES, ELECTRONIC SYSTEMS, AND ADDITIONAL METHODS.” This applicationis also related to U.S. patent application Ser. No. ______ (attorneydocket No. 2269-P15381US), filed on even date herewith, listing Kunal R.Parekh as inventor, for “METHODS OF FORMING MICROELECTRONIC DEVICES, ANDRELATED MICROELECTRONIC DEVICES AND ELECTRONIC SYSTEMS.” Thisapplication is also related to U.S. patent application Ser. No. ______(attorney docket No. 2269-P15382US), filed on even date herewith,listing Kunal R. Parekh as inventor, for “METHODS OF FORMINGMICROELECTRONIC DEVICES, AND RELATED MICROELECTRONIC DEVICES ANDELECTRONIC SYSTEMS.” This application is also related to U.S. patentapplication Ser. No. ______ (attorney docket No. 2269-P15384US), filedon even date herewith, listing Kunal R. Parekh as inventor, for “METHODSOF FORMING MICROELECTRONIC DEVICES, AND RELATED BASE STRUCTURES FORMICROELECTRONIC DEVICES.” The disclosure of each of the foregoingdocuments is hereby incorporated herein in its entirety by reference.

TECHNICAL FIELD

The disclosure, in various embodiments, relates generally to the fieldof microelectronic device design and fabrication. More specifically, thedisclosure relates to methods of forming microelectronic devices, and torelated microelectronic devices and electronic systems.

BACKGROUND

Microelectronic device designers often desire to increase the level ofintegration or density of features within a microelectronic device byreducing the dimensions of the individual features and by reducing theseparation distance between neighboring features. In addition,microelectronic device designers often desire to design architecturesthat are not only compact, but offer performance advantages, as well assimplified, easier and less expensive to fabricate designs.

One example of a microelectronic device is a memory device. Memorydevices are generally provided as internal integrated circuits incomputers or other electronic devices. There are many types of memorydevices including, but not limited to, non-volatile memory devices(e.g., NAND Flash memory devices). One way of increasing memory densityin non-volatile memory devices is to utilize vertical memory array (alsoreferred to as a “three-dimensional (3D) memory array”) architectures. Aconventional vertical memory array includes vertical memory stringsextending through openings in one or more decks (e.g., stack structures)including tiers of conductive structures and dielectric materials. Eachvertical memory string may include at least one select device coupled inseries to a serial combination of vertically stacked memory cells. Sucha configuration permits a greater number of switching devices (e.g.,transistors) to be located in a unit of die area (i.e., length and widthof active surface consumed) by building the array upwards (e.g.,vertically) on a die, as compared to structures with conventional planar(e.g., two-dimensional) arrangements of transistors.

Control logic devices within a base control logic structure underlying amemory array of a memory device (e.g., a non-volatile memory device)have been used to control operations (e.g., access operations, readoperations, write operations) on the memory cells of the memory device.An assembly of the control logic devices may be provided in electricalcommunication with the memory cells of the memory array by way ofrouting and interconnect structures. However, processing conditions(e.g., temperatures, pressures, materials) for the formation of thememory array over the base control logic structure can limit theconfigurations and performance of the control logic devices within thebase control logic structure. In addition, the quantities, dimensions,and arrangements of the different control logic devices employed withinthe base control logic structure can also undesirably impede reductionsto the size (e.g., horizontal footprint) of a memory device, and/orimprovements in the performance (e.g., faster memory cell ON/OFT speed,lower threshold switching voltage requirements, faster data transferrates, lower power consumption) of the memory device.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1A through 1F are simplified, partial cross-sectional viewsillustrating a method of forming a microelectronic device structure, inaccordance with embodiments of the disclosure.

FIGS. 2A through 2H are simplified, partial cross-sectional viewsillustrating a method of forming a microelectronic device using themicroelectronic device structure formed through the method describedwith reference to FIGS. 1A through 1F, in accordance with embodiments ofthe disclosure.

FIG. 3 is a schematic block diagram of an electronic system, inaccordance with an embodiment of the disclosure.

DETAILED DESCRIPTION

The following description provides specific details, such as materialcompositions, shapes, and sizes, in order to provide a thoroughdescription of embodiments of the disclosure. However, a person ofordinary skill in the art would understand that the embodiments of thedisclosure may be practiced without employing these specific details.Indeed, the embodiments of the disclosure may be practiced inconjunction with conventional microelectronic device fabricationtechniques employed in the industry. In addition, the descriptionprovided below does not form a complete process flow for manufacturing amicroelectronic device (e.g., a memory device, such as 3D NAND Flashmemory device). The structures described below do not form a completemicroelectronic device. Only those process acts and structures necessaryto understand the embodiments of the disclosure are described in detailbelow. Additional acts to form a complete microelectronic device fromthe structures may be performed by conventional fabrication techniques.

Drawings presented herein are for illustrative purposes only, and arenot meant to be actual views of any particular material, component,structure, device, or system. Variations from the shapes depicted in thedrawings as a result, for example, of manufacturing techniques and/ortolerances, are to be expected. Thus, embodiments described herein arenot to be construed as being limited to the particular shapes or regionsas illustrated, but include deviations in shapes that result, forexample, from manufacturing. For example, a region illustrated ordescribed as box-shaped may have rough and/or nonlinear features, and aregion illustrated or described as round may include some rough and/orlinear features. Moreover, sharp angles that are illustrated may berounded, and vice versa. Thus, the regions illustrated in the figuresare schematic in nature, and their shapes are not intended to illustratethe precise shape of a region and do not limit the scope of the presentclaims. The drawings are not necessarily to scale. Additionally,elements common between figures may retain the same numericaldesignation.

As used herein, a “memory device” means and includes microelectronicdevices exhibiting memory functionality, but not necessary limited tomemory functionality. Stated another way, and by way of non-limitingexample only, the term “memory device” includes not only conventionalmemory (e.g., conventional volatile memory, such as conventional dynamicrandom access memory (DRAM); conventional non-volatile memory, such asconventional NAND memory), but also includes an application specificintegrated circuit (ASIC) (e.g., a system on a chip (SoC)), amicroelectronic device combining logic and memory, and a graphicsprocessing unit (GPU) incorporating memory.

As used herein, the term “configured” refers to a size, shape, materialcomposition, orientation, and arrangement of one or more of at least onestructure and at least one apparatus facilitating operation of one ormore of the structure and the apparatus in a pre-determined way.

As used herein, the terms “vertical,” “longitudinal,” “horizontal,” and“lateral” are in reference to a major plane of a structure and are notnecessarily defined by earth's gravitational field. A “horizontal” or“lateral” direction is a direction that is substantially parallel to themajor plane of the structure, while a “vertical” or “longitudinal”direction is a direction that is substantially perpendicular to themajor plane of the structure. The major plane of the structure isdefined by a surface of the structure having a relatively large areacompared to other surfaces of the structure. With reference to thefigures, a “horizontal” or “lateral” direction may be perpendicular toan indicated “Z” axis, and may be parallel to an indicated “X” axisand/or parallel to an indicated “Y” axis; and a “vertical” or“longitudinal” direction may be parallel to an indicated “Z” axis, maybe perpendicular to an indicated “X” axis, and may be perpendicular toan indicated “Y” axis.

As used herein, features (e.g., regions, structures, devices) describedas “neighboring” one another means and includes features of thedisclosed identity (or identities) that are located most proximate(e.g., closest to) one another. Additional features (e.g., additionalregions, additional structures, additional devices) not matching thedisclosed identity (or identities) of the “neighboring” features may bedisposed between the “neighboring” features. Put another way, the“neighboring” features may be positioned directly adjacent one another,such that no other feature intervenes between the “neighboring”features; or the “neighboring” features may be positioned indirectlyadjacent one another, such that at least one feature having an identityother than that associated with at least one the “neighboring” featuresis positioned between the “neighboring” features. Accordingly, featuresdescribed as “vertically neighboring” one another means and includesfeatures of the disclosed identity (or identities) that are located mostvertically proximate (e.g., vertically closest to) one another.Moreover, features described as “horizontally neighboring” one anothermeans and includes features of the disclosed identity (or identities)that are located most horizontally proximate (e.g., horizontally closestto) one another.

As used herein, spatially relative terms, such as “beneath,” “below,”“lower,” “bottom,” “above,” “upper,” “top,” “front,” “rear,” “left,”“right,” and the like, may be used for ease of description to describeone element's or feature's relationship to another element(s) orfeature(s) as illustrated in the figures. Unless otherwise specified,the spatially relative terms are intended to encompass differentorientations of the materials in addition to the orientation depicted inthe figures. For example, if materials in the figures are inverted,elements described as “below” or “beneath” or “under” or “on bottom of”other elements or features would then be oriented “above” or “on top of”the other elements or features. Thus, the term “below” can encompassboth an orientation of above and below, depending on the context inwhich the term is used, which will be evident to one of ordinary skillin the art. The materials may be otherwise oriented (e.g., rotated 90degrees, inverted, flipped) and the spatially relative descriptors usedherein interpreted accordingly.

As used herein, the singular forms “a,” “an,” and “the” are intended toinclude the plural forms as well, unless the context clearly indicatesotherwise.

As used herein, “and/or” includes any and all combinations of one ormore of the associated listed items.

As used herein, the phrase “coupled to” refers to structures operativelyconnected with each other, such as electrically connected through adirect Ohmic connection or through an indirect connection (e.g., by wayof another structure).

As used herein, the term “substantially” in reference to a givenparameter, property, or condition means and includes to a degree thatone of ordinary skill in the art would understand that the givenparameter, property, or condition is met with a degree of variance, suchas within acceptable tolerances. By way of example, depending on theparticular parameter, property, or condition that is substantially met,the parameter, property, or condition may be at least 90.0 percent met,at least 95.0 percent met, at least 99.0 percent met, at least 99.9percent met, or even 100.0 percent met.

As used herein, “about” or “approximately” in reference to a numericalvalue for a particular parameter is inclusive of the numerical value anda degree of variance from the numerical value that one of ordinary skillin the art would understand is within acceptable tolerances for theparticular parameter. For example, “about” or “approximately” inreference to a numerical value may include additional numerical valueswithin a range of from 90.0 percent to 110.0 percent of the numericalvalue, such as within a range of from 95.0 percent to 105.0 percent ofthe numerical value, within a range of from 97.5 percent to 102.5percent of the numerical value, within a range of from 99.0 percent to101.0 percent of the numerical value, within a range of from 99.5percent to 100.5 percent of the numerical value, or within a range offrom 99.9 percent to 100.1 percent of the numerical value.

As used herein, “conductive material” means and includes electricallyconductive material such as one or more of a metal (e.g., tungsten (W),titanium (Ti), molybdenum (Mo), niobium (Nb), vanadium (V), hafnium(Hf), tantalum (Ta), chromium (Cr), zirconium (Zr), iron (Fe), ruthenium(Ru), osmium (Os), cobalt (Co), rhodium (Rh), iridium (Ir), nickel (Ni),palladium (Pa), platinum (Pt), copper (Cu), silver (Ag), gold (Au),aluminum (Al)), an alloy (e.g., a Co-based alloy, an Fe-based alloy, anNi-based alloy, an Fe- and Ni-based alloy, a Co- and Ni-based alloy, anFe- and Co-based alloy, a Co- and Ni- and Fe-based alloy, an Al-basedalloy, a Cu-based alloy, a magnesium (Mg)-based alloy, a Ti-based alloy,a steel, a low-carbon steel, a stainless steel), a conductivemetal-containing material (e.g., a conductive metal nitride, aconductive metal silicide, a conductive metal carbide, a conductivemetal oxide), and a conductively-doped semiconductor material (e.g.,conductively-doped polysilicon, conductively-doped germanium (Ge),conductively-doped silicon germanium (SiGe)). In addition, a “conductivestructure” means and includes a structure formed of and includingconductive material.

As used herein, “insulative material” means and includes electricallyinsulative material, such one or more of at least one dielectric oxidematerial (e.g., one or more of a silicon oxide (SiO_(x)),phosphosilicate glass, borosilicate glass, borophosphosilicate glass,fluorosilicate glass, an aluminum oxide (AlO_(x)), a hafnium oxide(HfO_(x)), a niobium oxide (NbO_(x)), a titanium oxide (TiO_(x)), azirconium oxide (ZrO_(x)), a tantalum oxide (TaO_(x)), and a magnesiumoxide (MgO_(x))), at least one dielectric nitride material (e.g., asilicon nitride (SiN_(y))), at least one dielectric oxynitride material(e.g., a silicon oxynitride (SiO_(x)N_(y))), at least one dielectricoxycarbide material (e.g., silicon oxycarbide (SiO_(x)C_(y))), at leastone hydrogenated dielectric oxycarbide material (e.g., hydrogenatedsilicon oxycarbide (SiC_(x)O_(y)H_(z))), and at least one dielectriccarboxynitride material (e.g., a silicon carboxynitride(SiO_(x)C_(z)N_(y))). Formulae including one or more of “x”, “y”, and“z” herein (e.g., SiO_(x), AlO_(x), HfO_(x), NbO_(x), TiO_(x), SiN_(y),SiO_(x)N_(y), SiO_(x)C_(y), SiC_(x)O_(y)H_(z), SiO_(x)C_(z)N_(y))represent a material that contains an average ratio of “x” atoms of oneelement, “y” atoms of another element, and “z” atoms of an additionalelement (if any) for every one atom of another element (e.g., Si, Al,Hf, Nb, Ti). As the formulae are representative of relative atomicratios and not strict chemical structure, an insulative material maycomprise one or more stoichiometric compounds and/or one or morenon-stoichiometric compounds, and values of “x”, “y”, and “z” (if any)may be integers or may be non-integers. As used herein, the term“non-stoichiometric compound” means and includes a chemical compoundwith an elemental composition that cannot be represented by a ratio ofwell-defined natural numbers and is in violation of the law of definiteproportions. In addition, an “insulative structure” means and includes astructure formed of and including insulative material.

Unless the context indicates otherwise, the materials described hereinmay be formed by any suitable technique including, but not limited to,spin coating, blanket coating, chemical vapor deposition (“CVD”), atomiclayer deposition (“ALD”), plasma enhanced ALD, physical vapor deposition(“PVD”) (e.g., sputtering), or epitaxial growth. Depending on thespecific material to be formed, the technique for depositing or growingthe material may be selected by a person of ordinary skill in the art.In addition, unless the context indicates otherwise, removal ofmaterials described herein may be accomplished by any suitable techniqueincluding, but not limited to, etching (e.g., dry etching, wet etching,vapor etching), ion milling, abrasive planarization, or other knownmethods.

FIGS. 1A through 1F are simplified partial cross-sectional viewsillustrating embodiments of a method of forming a microelectronic devicestructure (e.g., a memory device structure) for a microelectronic device(e.g., a memory device, such as a 3D NAND Flash memory device). With thedescription as provided below, it will be readily apparent to one ofordinary skill in the art that the methods described herein may be usedin various applications. In other words, the methods of the disclosuremay be used whenever it is desired to form a microelectronic device.

Referring to FIG. 1A, a microelectronic device structure 100 may beformed to include a base structure 102, and a doped semiconductivematerial 104 in, on, or over the base structure 102. As shown in FIG.1A, in some embodiments, the doped semiconductive material 104 is formedon an upper surface of the base structure 102. In additionalembodiments, at least one material (e.g., at least one insulativematerial) is formed between the base structure 102 and the dopedsemiconductive material 104. As a non-limiting example, a dielectricoxide material (e.g., SiO_(x), such as silicon dioxide (SiO₂)) may beformed between (e.g., vertically between) the base structure 102 and thedoped semiconductive material 104. In further embodiments, the dopedsemiconductive material 104 is also formed on or over one or moreadditional surfaces of the base structure 102. As a non-limitingexample, a first portion the doped semiconductive material 104 may beformed on or over the upper surface of the base structure 102, and asecond portion of the doped semiconductive material 104 under (e.g.,under and in physical contact with) a lower surface of the basestructure 102.

The base structure 102 of the microelectronic device structure 100comprises a base material or construction upon which additional features(e.g., materials, structures, devices) of the microelectronic devicestructure 100 are formed. The base structure 102 may, for example, beformed of and include one or more of semiconductive material (e.g., oneor more of a silicon material, such monocrystalline silicon orpolycrystalline silicon (also referred to herein as “polysilicon”);silicon-germanium; germanium; gallium arsenide; a gallium nitride;gallium phosphide; indium phosphide; indium gallium nitride; andaluminum gallium nitride), a base semiconductive material on asupporting structure, glass material (e.g., one or more of borosilicateglass (BSP), phosphosilicate glass (PSG), fluorosilicate glass (FSG),borophosphosilicate glass (BPSG), aluminosilicate glass, an alkalineearth boro-aluminosilicate glass, quartz, titania silicate glass, andsoda-lime glass), and ceramic material (e.g., one or more ofpoly-aluminum nitride (p-AlN), silicon on poly-aluminum nitride (SOPAN),aluminum nitride (AlN), aluminum oxide (e.g., sapphire; α-Al₂O₃), andsilicon carbide). The base structure 102 may be configured to facilitatesafe handling of the microelectronic device structure 100 for subsequentattachment to at least one additional microelectronic device structure,as described in further detail below.

The doped semiconductive material 104 may formed of and include at leastone semiconductive material doped with at least one conductive dopant(e.g., at least one n-type dopant, such as one or more of phosphorus(P), arsenic (Ar), antimony (Sb), and bismuth (Bi); at least one p-typedopant, such as one or more of boron (B), aluminum (Al), and gallium(Ga)). In some embodiments, the doped semiconductive material 104 isformed of and includes one or more of a silicon material, such asmonocrystalline silicon or polycrystalline silicon; a silicon-germaniummaterial; a germanium material; a gallium arsenide material; a galliumnitride material; and an indium phosphide material. As a non-limitingexample, the doped semiconductive material 104 may be formed of andinclude epitaxial silicon (e.g., monocrystalline silicon formed throughepitaxial growth) doped with at least one conductive dopant (e.g., atleast one n-type dopant, at least one p-type dopant). As anothernon-limiting example, the doped semiconductive material 104 may beformed of and include polycrystalline silicon doped with at least oneconductive dopant (e.g., at least one n-type dopant, at least one p-typedopant).

Referring next to FIG. 1B, a preliminary stack structure 106 may beformed on or over the doped semiconductive material 104. As shown inFIG. 1B, the preliminary stack structure 106 includes a verticallyalternating (e.g., in the Z-direction) sequence of insulative structures108 and sacrificial structures 110 arranged in tiers 112. Each of thetiers 112 of the preliminary stack structure 106 may include at leastone of the sacrificial structures 110 vertically neighboring at leastone of the insulative structures 108. The preliminary stack structure106 may be formed to include any desired number of the tiers 112, suchas greater than or equal to sixteen (16) of the tiers 112, greater thanor equal to thirty-two (32) of the tiers 112, greater than or equal tosixty-four (64) of the tiers 112, greater than or equal to one hundredand twenty-eight (128) of the tiers 112, or greater than or equal to twohundred and fifty-six (256) of the tiers 112. As shown in FIG. 1B, thepreliminary stack structure 106 may be formed to include a first tier112A vertically overlying (e.g., in the Z-direction) the dopedsemiconductive material 104, a second tier 112B vertically overlying thefirst tier 112A, and an additional quantity (e.g., number, amount) oftiers 112 vertically overlying the second tier 112B. The first tier 112Amay include a first insulative structure 108A and a first sacrificialstructure 110A over the first insulative structure 108A; and the secondtier 112B may include a second insulative structure 108B and a secondsacrificial structure 110B over the second insulative structure 108B. Asdescribed in further detail below, the first sacrificial structure 110Amay be employed to form select devices (also referred to herein as“selectors”) for a subsequently formed microelectronic device (e.g.,memory device).

As shown in FIG. 1B, the first tier 112A and the second tier 112B may beconfigured such that a vertical separation (e.g., in the Z-direction)between the first sacrificial structure 110A of the first tier 112A andthe second sacrificial structure 110B of the second tier 112B is greaterthan a vertical separation between other vertically neighboring tiers112 of the preliminary stack structure 106. For example, the secondinsulative structure 108B vertically interposed between the firstsacrificial structure 110A and the second sacrificial structure 110B maybe formed to have a relatively greater vertical thickness (e.g., in theZ-direction) than individual other of the insulative structures 108 ofthe preliminary stack structure 106 vertically overlying the secondinsulative structure 108B. A vertical thickness of the second insulativestructure 108B may, for example, be formed to be from about 1.25 toabout 2.5 times greater than a vertical thickness of another individualinsulative structure 108 (e.g., a third insulative structure, a fourthinsulative structure, a fifth insulative structure) of the preliminarystack structure 106 vertically overlying the second insulative structure108B.

The insulative structures 108 of the tiers 112 of the preliminary stackstructure 106 may be formed of and include at least one insulativematerial, such one or more of at least one dielectric oxide material(e.g., one or more of SiO_(x), phosphosilicate glass, borosilicateglass, borophosphosilicate glass, fluorosilicate glass, AlO_(x),HfO_(x), NbO_(x), TiO_(x), ZrO_(x), TaO_(x), and MgO_(x)), at least onedielectric nitride material (e.g., SiN_(y)), at least one dielectricoxynitride material (e.g., SiO_(x)N_(y)), and at least one dielectriccarboxynitride material (e.g., SiO_(x)C_(z)N_(y)). Each of theinsulative structures 108 may individually be substantially homogeneous,may be or a substantially heterogeneous. As used herein, the term“homogeneous” means amounts of a material do not vary throughoutdifferent portions (e.g., different horizontal portions, differentvertical portions) of a structure. Conversely, as used herein, the term“heterogeneous” means amounts of a material vary throughout differentportions of a structure. In some embodiments, each of the insulativestructures 108 is substantially homogeneous. In further embodiments, atleast one of the insulative structures 108 is substantiallyheterogeneous. One or more of the insulative structures 108 may, forexample, be formed of and include a stack (e.g., laminate) of at leasttwo different insulative materials (e.g., at least two differentdielectric materials). In some embodiments, each of the insulativestructures 108 is formed of and includes a dielectric oxide material,such as SiO_(x) (e.g., SiO₂). The insulative structures 108 may each besubstantially planar, and may each individually exhibit a desiredthickness (e.g., vertical height in the Z-direction). In addition, eachof the insulative structures 108 may be substantially the same (e.g.,have substantially the same material composition, material distribution,size, and shape) as one another, or at least one of the insulativestructures 108 may be different (e.g., have one or more of a differentmaterial composition, a different material distribution, a differentsize, and a different shape) than at least one other of the insulativestructures 108. In some embodiments, each of the insulative structures108 is substantially the same as each other of the insulative structures108.

The sacrificial structures 110 of the tiers 112 of the preliminary stackstructure 106 may be formed of and include at least one material (e.g.,at least one insulative material) that may be selectively removedrelative to the insulative material of the insulative structures 108. Amaterial composition of the sacrificial structures 110 is different thana material composition of the insulative structures 108. The sacrificialstructures 110 may be selectively etchable relative to the insulativestructures 108 during common (e.g., collective, mutual) exposure to afirst etchant, and the insulative structures 108 may be selectivelyetchable to the sacrificial structures 110 during common exposure to asecond, different etchant. As used herein, a material is “selectivelyetchable” relative to another material if the material exhibits an etchrate that is at least about five times (5×) greater than the etch rateof another material, such as about ten times (10×) greater, about twentytimes (20×) greater, or about forty times (40×) greater. As anon-limiting example, the sacrificial structures 110 may be formed ofand include an additional insulative material, such as one or more of atleast one dielectric oxide material (e.g., one or more of SiO_(x),phosphosilicate glass, borosilicate glass, borophosphosilicate glass,fluorosilicate glass, AlO_(x), HfO_(x), NbO_(x), TiO_(x), ZrO_(x),TaO_(x), and MgO_(x)), at least one dielectric nitride material (e.g.,SiN_(y)), at least one dielectric oxynitride material (e.g.,SiO_(x)N_(y)), and at least one dielectric carboxynitride material(e.g., SiO_(x)C_(z)N_(y)). In some embodiments, each of the sacrificialstructures 110 is formed of and includes a dielectric nitride material,such as SiN_(y) (e.g., Si₃N₄). Each of the sacrificial structures 110may individually be substantially homogeneous or substantiallyheterogeneous. In some embodiments, each of the sacrificial structures110 of the preliminary stack structure 106 is substantially homogeneous.In additional embodiments, at least one of the sacrificial structures110 of the preliminary stack structure 106 is substantiallyheterogeneous. The sacrificial structures 110 may each be substantiallyplanar, and may each individually exhibit a desired thickness (e.g.,vertical height in the Z-direction). In addition, each of thesacrificial structures 110 may be substantially the same (e.g., exhibitsubstantially the same material composition, material distribution,size, and shape) as one another, or at least one of the sacrificialstructures 110 may be different (e.g., exhibit one or more of adifferent material composition, a different material distribution, adifferent size, and a different shape) than at least one other of thesacrificial structures 110. In some embodiments, each of the sacrificialstructures 110 is substantially the same as each other of thesacrificial structures 110.

Referring next to FIG. 1C, openings 114 (e.g., apertures, vias) may beformed to vertically extend (e.g., in the Z-direction) through each ofthe preliminary stack structure 106 and the doped semiconductivematerial 104, and into the base structure 102; and then semiconductivestructures 115 may be formed (e.g., epitaxially grown) within and maypartially fill the openings 114. As shown FIG. 1C, the openings 114 mayeach individually vertically extend from an uppermost surface of thepreliminary stack structure 106 to a vertical position between anuppermost surface of the base structure 102 and a lowermost surface ofthe base structure 102. The semiconductive structures 115 may fill lowerportions of the openings 114, as described in further detail below.Remaining (e.g., unfilled), upper portions of the openings 114 may beused to form cell pillar structures employed to form verticallyextending strings of memory cells, as described in further detail below.

The openings 114 may each individually be formed to exhibit a geometricconfiguration (e.g., dimensions, shapes) and spacing. The geometricconfigurations and spacing of the openings 114 may be selected at leastpartially based on the configurations and positions of other features ofthe microelectronic device structure 100. For example, the openings 114may be sized, shape, and spaced to facilitate desired geometricconfigurations and spacing of additional features (e.g., additionalstructures, additional materials) to subsequently be formed therein. Insome embodiments, each opening 114 is formed to have a substantiallycircular horizontal cross-sectional shape. In additional embodiments,one or more (e.g., each) of the openings 114 is formed to have adifferent (e.g., non-circular) horizontal cross-sectional shape, such asone or more of a tetragonal horizontal cross-sectional shape (e.g., asquare horizontal cross-sectional shape), an ovular horizontalcross-sectional shape, an elliptical horizontal cross-sectional shape, atriangular horizontal cross-sectional shape, or another horizontalcross-sectional shape. Each of the openings 114 may be formed to exhibitsubstantially the same geometric configuration (e.g., the samedimensions and the same shape) and horizontal spacing (e.g., in theX-direction, in the Y-direction) as each other of the openings 114, orat least some of the openings 114 may be formed to exhibit a differentgeometric configuration (e.g., one or more different dimensions, adifferent shape) and/or different horizontal spacing than at least someother of the openings 114.

Still referring to FIG. 1C, within each opening 114, the semiconductivestructure 115 therein may be formed (e.g., epitaxially grown) tovertically extend from a lower vertical boundary of the opening 114within the base structure 102 (e.g., between an uppermost surface of thebase structure 102 and a lowermost surface of the base structure 102) toa location vertically overlying the first sacrificial structure 110A ofthe first tier 112A of the preliminary stack structure 106. Eachsemiconductive structure 115 may vertically extend from a lower boundarywithin the base structure 102, through each of the doped semiconductivematerial 104 and the first tier 112A (including the first insulativestructure 108A and the first sacrificial structure 110A thereof) of thepreliminary stack structure 106, and to an upper boundary withinvertically boundaries of another of the tiers 112 (e.g., within thesecond tier 112B) of the preliminary stack structure 106. In someembodiments, within each opening 114, an upper boundary (e.g., uppersurface) of the semiconductive structure 115 therein is formed to bepositioned between an upper vertical boundary (e.g., an upper surface)and a lower vertical boundary (e.g., a lower surface) of the secondinsulative structure 108B of the second tier 112B of the preliminarystack structure 106.

The semiconductive structures 115 may be formed of and include anepitaxial semiconductive material (e.g., a semiconductive materialformed through epitaxial growth). In some embodiments, thesemiconductive structures 115 are formed of and include epitaxialsilicon (e.g., monocrystalline silicon formed through epitaxial growth).

Referring next to FIG. 1D, cell pillar structures 116 and dopedsemiconductive structures 117 may be formed within the remainingportions of the openings 114 (FIG. 1C). The cell pillar structures 116and the doped semiconductive structures 117 may at least partially(e.g., substantially) fill the remaining portions of the openings 114(FIG. 1C). As shown in FIG. 1D, the doped semiconductive structures 117may vertically intervene between the semiconductive structures 115 andthe cell pillar structures 116 within the openings 114 (FIG. 1C). Forexample, the doped semiconductive structures 117 may be formed in or onthe semiconductive structures 115, and the cell pillar structures 116may be formed on the doped semiconductive structures 117. In someembodiments, the doped semiconductive structures 117 are positionedbetween an upper vertical boundary (e.g., an upper surface) and a lowervertical boundary (e.g., a lower surface) of the second insulativestructure 108B of the second tier 112B of the preliminary stackstructure 106. Uppermost surfaces of the cell pillar structures 116 maybe substantially coplanar with the uppermost surface of the preliminarystack structure 106.

The doped semiconductive structures 117 may each individually be formedof and include at least one semiconductive material doped with at leastone conductive dopant (e.g., at least one n-type dopant, such as one ormore of phosphorus (P), arsenic (Ar), antimony (Sb), and bismuth (Bi);at least one p-type dopant, such as one or more of boron (B), aluminum(Al), and gallium (Ga)). A material composition of the dopedsemiconductive structures 117 may be substantially the same as amaterial composition of the doped semiconductive material 104, or thematerial composition of the doped semiconductive structures 117 may bedifferent than the material composition of the doped semiconductivematerial 104. In some embodiments, the doped semiconductive structures117 are formed of and include one or more of a silicon material, such asmonocrystalline silicon or polycrystalline silicon; a silicon-germaniummaterial; a germanium material; a gallium arsenide material; a galliumnitride material; and an indium phosphide material. As a non-limitingexample, the doped semiconductive structures 117 may be formed of andinclude epitaxial silicon (e.g., monocrystalline silicon formed throughepitaxial growth) doped with at least one conductive dopant (e.g., atleast one n-type dopant, at least one p-type dopant). As anothernon-limiting example, the doped semiconductive structures 117 may beformed of and include polycrystalline silicon doped with at least oneconductive dopant (e.g., at least one n-type dopant, at least one p-typedopant).

The cell pillar structures 116 may each individually be formed of andinclude a stack of materials facilitating the use of the cell pillarstructures 116 to form vertically extending strings of memory cellsfollowing subsequent processing acts, as described in further detailbelow. By way of non-limiting example, each of the cell pillarstructures 116 may be formed to include a first dielectric oxidematerial 118 (e.g., SiO_(x), such as SiO₂, AlO_(x), such as Al₂O₃), adielectric nitride material 120 (e.g., SiN_(y), such as Si₃N₄), a secondoxide dielectric material 122 (e.g., SiO_(x), such as SiO₂), asemiconductive material 124 (e.g., Si, such as polycrystalline Si), anda dielectric fill material 125 (e.g., a dielectric oxide, a dielectricnitride, air). The first dielectric oxide material 118 may be formed onor over surfaces of the microelectronic device structure 100 (e.g.,surfaces of the preliminary stack structure 106, and the dopedsemiconductive structures 117) at boundaries (e.g., horizontallyboundaries, lower vertical boundaries) of the remaining portions of theopenings 114 (FIG. 1C). The dielectric nitride material 120 may beformed on or over surfaces of the first dielectric oxide material 118within the openings 114 (FIG. 1C). The second oxide dielectric material122 may be formed on or over surfaces of the dielectric nitride material120 within the openings 114 (FIG. 1C). The semiconductive material 124may be formed on or over surfaces of the second oxide dielectricmaterial 122 within the openings 114 (FIG. 1C). The dielectric fillmaterial 125 may occupy (e.g., fill) central portions of the openings114 (FIG. 1C) not occupied by other features (e.g., the first dielectricoxide material 118, the dielectric nitride material 120, the secondoxide dielectric material 122, the semiconductive material 124) of thecell pillar structures 116.

The cell pillar structures 116 may be formed by sequentially depositingthe first dielectric oxide material 118, the dielectric nitride material120, the second oxide dielectric material 122, and the semiconductivematerial 124 within the remaining portions of the openings 114 (FIG.1D). Thereafter, portions of the first dielectric oxide material 118,the dielectric nitride material 120, the second oxide dielectricmaterial 122, and the semiconductive material 124 at horizontallycentral and vertically lower positions within the remaining portions ofthe openings 114 (FIG. 1D) may be removed (e.g., punched through) toexpose (e.g., uncover) regions of the doped semiconductive structures117. In some embodiments, the first dielectric oxide material 118, thedielectric nitride material 120, the second oxide dielectric material122, and the semiconductive material 124 are subjected to a punchthrough etch to expose the regions of the doped semiconductivestructures 117. The punch through etch may also partially etch into thedoped semiconductive structures 117. As the openings 114 (FIG. 1D) mayhorizontally taper inward as they proceed vertically deeper into themicroelectronic device structure 100, the formation of the dopedsemiconductive material 104 may facilitate the punch through etch byeffectively increasing the critical dimensions portions of the openings114 (FIG. 1C) serving as lower boundaries for the cell pillar structures116 relative to critical dimensions of the actual lower boundaries(e.g., the lower boundaries of the second portions 105B of the dopedsemiconductive material 104) of the openings 114 (FIG. 1C). Followingthe punch through etch, the dielectric fill material 125 may be providedon or over the semiconductive material 124, and a material removalprocess (e.g., planarization process, such as a CMP process) may beemployed to expose an upper surface the preliminary stack structure 106and form the cell pillar structures 116.

Referring next to FIG. 1E, the microelectronic device structure 100 maybe subjected to so called “replacement gate” or “gate last” processingacts to at least partially replace the sacrificial structures 110 (FIG.1D) of the preliminary stack structure 106 (FIG. 1D) with conductivestructures 130 and form a stack structure 126. As shown in FIG. 1E, thestack structure 126 includes a vertically alternating (e.g., in theZ-direction) sequence of additional insulative structures 128 and theconductive structures 130 arranged in tiers 132. The additionalinsulative structures 128 may correspond to remainders (e.g., remainingportions, unremoved portions) of the insulative structures 108 (FIG. 1D)of the preliminary stack structure 106 (FIG. 1D) following the“replacement gate” processing acts. In addition, deep contact structures134 may be formed to vertically extend through the stack structure 126and to or into the doped semiconductive material 104. The deep contactstructures 134 may be electrically isolated from the conductivestructures 130 of the tiers 132 of the stack structure 126 by way ofinsulative liner structures 136 formed to horizontally intervene betweenthe deep contact structures 134 and the stack structure 126.

Each of the tiers 132 of the stack structure 126 includes at least oneof the conductive structures 130 vertically neighboring at least one ofthe additional insulative structures 128. As shown in FIG. 1E, the stackstructure 126 may be formed to include a first tier 132A verticallyoverlying (e.g., in the Z-direction) the doped semiconductive material104, a second tier 132B vertically overlying the first tier 132A, and anadditional quantity (e.g., number, amount) of tiers 132 verticallyoverlying the second tier 132B. The first tier 132A may include a firstadditional insulative structure 128A and a first conductive structure130A over the first additional insulative structure 128A; and the secondtier 132B may include a second additional insulative structure 128B anda second conductive structure 130B over the second additional insulativestructure 128B. As described in further detail below, the firstconductive structure 130A may be employed to form select devices for asubsequently formed microelectronic device (e.g., memory device).

The conductive structures 130 of the tiers 132 of the stack structure126 may be formed of and include conductive material. By way ofnon-limiting example, the conductive structures 130 may eachindividually be formed of and include a metallic material comprising oneor more of at least one metal, at least one alloy, and at least oneconductive metal-containing material (e.g., a conductive metal nitride,a conductive metal silicide, a conductive metal carbide, a conductivemetal oxide). In some embodiments, the conductive structures 130 areformed of and include W. Each of the conductive structures 130 mayindividually be substantially homogeneous, or one or more of theconductive structures 130 may individually be substantiallyheterogeneous. In some embodiments, each of the conductive structures130 is formed to be substantially homogeneous. In additionalembodiments, each of the conductive structures 130 is formed to beheterogeneous. Each conductive structures 130 may, for example, beformed of and include a stack of at least two different conductivematerials.

Still referring to FIG. 1E, gate dielectric material 119 may be formedaround the conductive structures 130. The gate dielectric material 119may be formed of and include at least one dielectric material, such asone or more of at least one dielectric oxide material (e.g., one or moreof SiO_(x), AlO_(x), phosphosilicate glass, borosilicate glass,borophosphosilicate glass, fluorosilicate glass), at least onedielectric nitride material (e.g., SiN_(y)), and at least one low-Kdielectric material (e.g., one or more of SiO_(x)C_(y), SiO_(x)N_(y),SiC_(x)O_(y)H_(z), and SiO_(x)C_(z)N_(y)). In some embodiments, each ofthe gate dielectric material 119 is formed of and includes at least onedielectric oxide material (e.g., SiO_(x), such as SiO₂).

As shown in FIG. 1E, within the first tier 132A of the stack structure126, the combination of the first conductive structure 130A, the gatedielectric material 119, and the semiconductive structures 115 may formselect devices 121. In embodiments wherein the gate dielectric material119 is formed of and includes a dielectric oxide material (e.g.,SiO_(x), such as SiO₂), the select devices 121 comprisemetal-oxide-semiconductor (MOS) select devices (also referred to hereinas “MOS selectors”). The first conductive structure 130A may serve as ametal structure for the select devices 121 (e.g., MOS selectors), thesemiconductive structures 115 may serve as semiconductive structures forthe select devices 121 (e.g., MOS selectors), and the gate dielectricmaterial 119 may intervene between the first conductive structure 130Aand the semiconductive structures 115. As shown in FIG. 1E, for anindividual select device 121 (e.g., an individual MOS selector), thegate dielectric material 119 thereof may be horizontally interposedbetween side surfaces of the first conductive structure 130A and anindividual semiconductive structure 115 associated with the selectdevice 121.

Still referring to FIG. 1E, one or more additional, liner materials(e.g., insulative liner material, conductive liner material) may also beformed around the conductive structures 130. The additional, linermaterial(s) may, for example, be formed of and include one or more ametal (e.g., titanium, tantalum), an alloy, a metal nitride (e.g.,tungsten nitride, titanium nitride, tantalum nitride), and a metal oxide(e.g., aluminum oxide). In some embodiments, the additional, linermaterial(s) comprise at least one conductive material employed as a seedmaterial for the formation of the conductive structures 130. In somesuch embodiments, the additional, liner material(s) comprise titaniumnitride. In further embodiments, the additional, liner material(s)further include aluminum oxide. As a non-limiting example, aluminumoxide may be formed directly adjacent the one or more of the gatedielectric material 119 and the additional insulative structures 128,titanium nitride may be formed directly adjacent the aluminum oxide, andtungsten may be formed directly adjacent the titanium nitride. Forclarity and ease of understanding the description, the additional, linermaterial(s) are not illustrated in FIG. 1E, but it will be understoodthat the additional, liner material(s) may be disposed around theconductive structures 130.

To form the stack structure 126 through “replacement gate” processingacts, slots (e.g., slits, trenches) may be formed to vertically extendthrough the preliminary stack structure 106 (FIG. 1D) to form discreteblocks. Thereafter, portions of the sacrificial structures 110 (FIG. 1D)of the preliminary stack structure 106 (FIG. 1D) may be selectivelyremoved (e.g., selectively etched and exhumed) through the slots, andreplaced with dielectric material and conductive material to form thegate dielectric material 119 and the conductive structures 130. Some ofthe conductive structures 130 may function as access line structures(e.g., word line structures) for a microelectronic device (e.g., amemory device, such as a 3D NAND Flash memory device) to subsequently beformed using the microelectronic device structure 100, and other of theconductive structures 130 (e.g., the first conductive structure 130A)may function as select gate structures for the subsequently formedmicroelectronic device. Following the formation of the conductivestructures 130 the slots may be filled with at least one dielectricmaterial.

With continued reference to FIG. 1E, intersections of the cell pillarstructures 116 and the conductive structures 130 of the tiers 132 of thestack structure 126 may define vertically extending strings of memorycells 138 coupled in series with one another within the stack structure126. In some embodiments, the memory cells 138 formed at theintersections of the conductive structures 130 and the cell pillarstructures 116 within different tiers 132 of the stack structure 126comprise so-called “MONOS” (metal-oxide-nitride-oxide-semiconductor)memory cells. In additional embodiments, the memory cells 138 compriseso-called “TANOS” (tantalum nitride-aluminumoxide-nitride-oxide-semiconductor) memory cells, or so-called “BETANOS”(band/barrier engineered TANOS) memory cells, each of which are subsetsof MONOS memory cells. In further embodiments, the memory cells 138comprise so-called “floating gate” memory cells including floating gates(e.g., metallic floating gates) as charge storage structures. Thefloating gates may horizontally intervene between central structures ofthe cell pillar structures 116 and the conductive structures 130 of thedifferent tiers 132 of the stack structure 126.

The deep contact structures 134 may be configured and positioned toelectrically connect one or more features to subsequently be formed overthe stack structure 126 with one or more other features (e.g., the dopedsemiconductive material 104, additional features to subsequently beformed and coupled to the doped semiconductive material 104) underlyingthe stack structure 126. The deep contact structures 134 may be formedof and include conductive material. In some embodiments, the deepcontact structures 134 are formed of and include W. In additionalembodiments, the deep contact structures 134 are formed of and includeconductively doped polysilicon.

The insulative liner structures 136 continuously extend over andsubstantially cover side surfaces of the deep contact structures 134.The insulative liner structures 136 may be formed over and include atleast one insulative material, such as one or more of at least onedielectric oxide material (e.g., one or more of SiO_(x), phosphosilicateglass, borosilicate glass, borophosphosilicate glass, fluorosilicateglass, AlO_(x), HfO_(x), NbO_(x), TiO_(x), ZrO_(x), TaO_(x), and aMgO_(x)), at least one dielectric nitride material (e.g., SiN_(y)), atleast one dielectric oxynitride material (e.g., SiO_(x)N_(y)), and atleast one dielectric carboxynitride material (e.g., SiO_(x)C_(z)N_(y)).In some embodiments, each of the insulative liner structures 136 isformed of and includes at least one dielectric oxide material (e.g.,SiO_(x), such as SiO₂).

Referring next to FIG. 1F, digit line structures 139 (e.g., data linestructures, bit line structures), insulative line structures 140, digitline contact structures 142, bond pads 144, and isolation material 146may be formed on or over the stack structure 126. The digit linestructures 139 may be formed vertically over and in electricalcommunication with the vertically extending strings of memory cells 138and the deep contact structures 134. The insulative line structures 140may be formed on or over the digit line structures 139. The digit linecontact structures 142 may vertically extend through the insulative linestructures 140, and may contact the digit line structures 139. For eachdigit line contact structure 142, a first portion 142A thereof mayvertically overlie one of the insulative line structures 140, and asecond portion 142B thereof may vertically extend through the insulativeline structure 140 and contact (e.g., physically contact, electricallycontact) one of the digit line structures 139. The bond pads 144 may beformed on or over the digit line contact structures 142. The isolationmaterial 146 may cover and surround of portions of the stack structure126, the digit line structures 139, the insulative line structures 140,the digit line contact structures 142, and the bond pads 144.

The digit line structures 139 may exhibit horizontally elongate shapesextending in parallel in a first horizontal direction (e.g., theY-direction). As used herein, the term “parallel” means substantiallyparallel. The digit line structures 139 may each exhibit substantiallythe same dimensions (e.g., width in the X-direction, length in aY-direction, height in the Z-direction), shape, and spacing (e.g., inthe X-direction). In additional embodiments, one or more of the digitline structures 139 may exhibit one or more of at least one differentdimension (e.g., a different length, a different width, a differentheight) and a different shape than one or more other of the digit linestructures 139, and/or the spacing (e.g., in the X-direction) between atleast two horizontally neighboring digit line structures 139 may bedifferent than the spacing between at least two other horizontallyneighboring digit line structures 139.

The digit line structures 139 may be formed of and include conductivematerial. By way of non-limiting example, the digit line structures 139may each individually be formed of and include a metallic materialcomprising one or more of at least one metal, at least one alloy, and atleast one conductive metal-containing material (e.g., a conductive metalnitride, a conductive metal silicide, a conductive metal carbide, aconductive metal oxide). In some embodiments, the digit line structures139 are each individually formed of and include W. Each of the digitline structures 139 may individually be substantially homogeneous, orone or more of the digit line structures 139 may individually besubstantially heterogeneous. If a digit line structure 139 isheterogeneous, amounts of one or more elements included in the digitline structure 139 may vary stepwise (e.g., change abruptly), or mayvary continuously (e.g., change progressively, such as linearly,parabolically) throughout different portions of the digit line structure139. In some embodiments, each of the digit line structures 139 issubstantially homogeneous. In additional embodiments, each of the digitline structures 139 is heterogeneous. Each digit line structures 139may, for example, be formed of and include a stack of at least twodifferent conductive materials.

The insulative line structures 140 may serve as insulative capstructures (e.g., dielectric cap structures) for the digit linestructures 139. The insulative line structures 140 may have horizontallyelongate shapes extending in parallel in the first horizontal direction(e.g., the Y-direction). Horizontal dimensions, horizontal pathing, andhorizontal spacing of the insulative line structures 140 may besubstantially the same and the horizontal dimensions, horizontalpathing, and horizontal spacing of the digit line structures 139.

The insulative line structures 140 may be formed of and includeinsulative material. By way of non-limiting example, the insulative linestructures 140 may each individually be formed of and include adielectric nitride material, such as SiN_(y) (e.g., Si₃N₄). Theinsulative line structures 140 may each be substantially homogeneous, orone or more of the insulative line structures 140 may be heterogeneous.If an insulative line structure 140 is heterogeneous, amounts of one ormore elements included in the insulative line structure 140 may varystepwise (e.g., change abruptly), or may vary continuously (e.g., changeprogressively, such as linearly, parabolically) throughout differentportions of the insulative line structure 140. In some embodiments, eachof the insulative line structures 140 is substantially homogeneous. Inadditional embodiments, each of the insulative line structures 140 isheterogeneous. Each insulative line structures 140 may, for example, beformed of and include a stack of at least two different dielectricmaterials.

Still referring to FIG. 1F, individual digit line contact structures 142may be at least partially (e.g., substantially) horizontally aligned inthe X-direction with individual insulative line structures 140 (and,hence, individual digit line structures 139). For example, horizontalcenterlines of the digit line contact structures 142 in the X-directionmay be substantially aligned with horizontal centerlines of theinsulative line structures 140 in the X-direction. In addition, thedigit line contact structures 142 may be formed at desired locations inthe Y-direction along the insulative line structures 140 (and, hence,the digit line structures 139). In some embodiments, at least some ofthe digit line contact structures 142 are provided at differentpositions in the Y-direction than one another. For example, a first ofthe digit line contact structures 142 may be provided at differentposition along a length in the Y-direction of a first of the insulativeline structures 140 as compared to a position of a second of the digitline contact structures 142 along a length in the Y-direction of asecond of the insulative line structures 140. Put another way, at leastsome (e.g., all) of the digit line contact structures 142 may behorizontally offset from one another in the Y-direction. In additionalembodiments, two or more of the digit line contact structures 142 arehorizontally aligned with one another in the Y-direction. In someembodiments, the digit line contact structures 142 are employed as digitline contact structures (e.g., data line contact structures, bit linecontact structures) for a microelectronic device (e.g., a memory device)to be formed using the microelectronic device structure 100, asdescribed in further detail below.

The digit line contact structures 142 may be formed to exhibit desiredgeometric configurations (e.g., desired dimensions, desired shapes). Asshown in FIG. 1F, in some embodiments, the first portion 142A (e.g.,upper portion) of an individual digit line contact structure 142 isformed to wider than the second portion 142B (e.g., lower portion) ofthe digit line contact structure 142. Side surfaces of the isolationmaterial 146 may define horizontal boundaries of the digit line contactstructure 142. The digit line contact structures 142 may verticallyextend (e.g., in the Z-direction) from lower vertical boundaries (e.g.,lower surfaces) of the bond pads 144 to upper vertical boundaries (e.g.,upper surfaces) of the digit line structures 139.

The digit line contact structures 142 may each individually be formed ofand include conductive material. By way of non-limiting example, thedigit line contact structures 142 may be formed of and include one ormore of at least one metal, at least one alloy, and at least oneconductive metal-containing material (e.g., a conductive metal nitride,a conductive metal silicide, a conductive metal carbide, a conductivemetal oxide). In some embodiments, the digit line contact structures 142are formed of and include Cu. In additional embodiments, the digit linecontact structures 142 are formed of and include W.

The bond pads 144 may be formed on or over upper surfaces of the digitline contact structures 142. The bond pads 144 may be formed tohorizontally extend over multiple insulative line structures 140 (and,hence, over multiple digit line structures 139). Individual bond pads144 may be coupled to individual digit line contact structures 142. Thebond pads 144 may be employed to couple the digit line contactstructures 142 to additional bond pads and additional conductive contactstructures, as described in further detail below.

The bond pads 144 may each individually be formed of and includeconductive material. By way of non-limiting example, the bond pads 144may be formed of and include one or more of at least one metal, at leastone alloy, and at least one conductive metal-containing material (e.g.,a conductive metal nitride, a conductive metal silicide, a conductivemetal carbide, a conductive metal oxide). A material composition of thebond pads 144 may be substantially the same as a material composition ofthe digit line contact structures 142, or the material composition ofthe bond pads 144 may be different than the material composition of thedigit line contact structures 142. In some embodiments, the bond pads144 are formed of and include Cu.

Still referring to FIG. 1F, the isolation material 146 may be formed ofand include at least one insulative material. By way of non-limitingexample, the isolation material 146 may be formed of and include one ormore of at least one dielectric oxide material (e.g., one or more ofSiO_(x), phosphosilicate glass, borosilicate glass, borophosphosilicateglass, fluorosilicate glass, AlO_(x), HfO_(x), NbO_(x), and TiO_(x)), atleast one dielectric nitride material (e.g., SiN_(y)), at least onedielectric oxynitride material (e.g., SiO_(x)N_(y)), at least onedielectric carboxynitride material (e.g., SiO_(x)C_(z)N_(y)), andamorphous carbon. In some embodiments, the isolation material 146 isformed of and includes SiO_(x) (e.g., SiO₂). The isolation material 146may be substantially homogeneous, or the isolation material 146 may beheterogeneous. If the isolation material 146 is heterogeneous, amountsof one or more elements included in the isolation material 146 may varystepwise (e.g., change abruptly), or may vary continuously (e.g., changeprogressively, such as linearly, parabolically) throughout differentportions of the isolation material 146. In some embodiments, theisolation material 146 is substantially homogeneous. In additionalembodiments, the isolation material 146 is heterogeneous. The isolationmaterial 146 may, for example, be formed of and include a stack of atleast two different dielectric materials.

The microelectronic device structure 100 following the process stagepreviously described with reference to FIG. 1F may be used to form amicroelectronic device (e.g., a memory device, such as a 3D NAND Flashmemory device) of the disclosure. By way of non-limiting example, FIGS.2A through 2H are simplified, partial cross-sectional views illustratinga method of forming a microelectronic device, in accordance withembodiments of the disclosure. With the description provided below, itwill be readily apparent to one of ordinary skill in the art that themethods and structures described herein may be used to form variousdevices and electronic systems.

Referring to FIG. 2A, an additional microelectronic device structure 200to subsequently be attached to the microelectronic device structure 100(FIG. 1F) may be formed. The additional microelectronic device structure200 may be formed to include a semiconductive base structure 202, gatestructures 204, first routing structures 206, first contact structures208, second contact structures 210, additional bond pads 212, and anadditional isolation material 214. The additional microelectronic devicestructure 200 may form a control logic region 216 of a microelectronicdevice to subsequently be formed using the additional microelectronicdevice structure 200 and the microelectronic device structure 100 (FIG.1F), as described in further detail below. Portions of thesemiconductive base structure 202, the gate structures 204, the firstrouting structures 206, and the first contact structures 208 of theadditional microelectronic device structure 200 form various controllogic devices 218 of the control logic region 216, as also described infurther detail below.

The semiconductive base structure 202 (e.g., semiconductive wafer) ofthe additional microelectronic device structure 200 comprises a basematerial or construction upon which additional features (e.g.,materials, structures, devices) of the additional microelectronic devicestructure 200 are formed. The semiconductive base structure 202 maycomprise a semiconductive structure (e.g., a semiconductive wafer), or abase semiconductive material on a supporting structure. For example, thesemiconductive base structure 202 may comprise a conventional siliconsubstrate (e.g., a conventional silicon wafer), or another bulksubstrate comprising a semiconductive material. In some embodiments, thesemiconductive base structure 202 comprises a silicon wafer. Inaddition, the semiconductive base structure 202 may include one or morelayers, structures, and/or regions formed therein and/or thereon. Forexample, the semiconductive base structure 202 may include conductivelydoped regions and undoped regions. The conductively doped regions may,for example, be employed as source regions and drain regions fortransistors of the control logic devices 218 of the control logic region216; and the undoped regions may, for example, be employed as channelregions for the transistors of the control logic devices 218.

As shown in FIG. 2A, the gate structures 204 of the control logic region216 of the additional microelectronic device structure 200 mayvertically overlie (e.g., in the Z-direction) portions of thesemiconductive base structure 202. The gate structures 204 mayindividually horizontally extend between and be employed by transistorsof the control logic devices 218 within the control logic region 216 ofthe additional microelectronic device structure 200. The gate structures204 may be formed of and include conductive material. A gate dielectricmaterial (e.g., a dielectric oxide) may vertically intervene (e.g., inthe Z-direction) between the gate structures 204 and channel regions(e.g., within the semiconductive base structure 202) of the transistors.

The first routing structures 206 may vertically overlie (e.g., in theZ-direction) the semiconductive base structure 202, and may beelectrically connected to the semiconductive base structure 202 by wayof the first contact structures 208. The first routing structures 206may serve as local routing structures for a microelectronic device tosubsequently be formed using the additional microelectronic devicestructure 200 and the microelectronic device structure 100 (FIG. 1F). Afirst group 208A of the first contact structures 208 may verticallyextend between and couple regions (e.g., conductively doped regions,such as source regions and drain regions) of the semiconductive basestructure 202 to one or more of the first routing structures 206. Inaddition, a second group 208B of the first contact structures 208 mayvertically extend between and couple some of the first routingstructures 206 to one another.

The first routing structures 206 may each individually be formed of andinclude conductive material. By way of non-limiting example, the firstrouting structures 206 may be formed of and include one or more of atleast one metal, at least one alloy, and at least one conductivemetal-containing material (e.g., a conductive metal nitride, aconductive metal silicide, a conductive metal carbide, a conductivemetal oxide). In some embodiments, the first routing structures 206 areformed of and include Cu. In additional embodiments, the first routingstructures 206 are formed of and include W.

The first contact structures 208 (including the first group 208A and thesecond group 208B thereof) may each individually be formed of andinclude conductive material. By way of non-limiting example, the firstrouting structures 206 may be formed of and include one or more of atleast one metal, at least one alloy, and at least one conductivemetal-containing material (e.g., a conductive metal nitride, aconductive metal silicide, a conductive metal carbide, a conductivemetal oxide). In some embodiments, the first contact structures 208 areformed of and include Cu. In additional embodiments, the first contactstructures 208 are formed of and include W. In further embodiments, thefirst contact structures 208 of the first group 208A of the firstcontact structures 208 are formed of and include first conductivematerial (e.g., W); and the first contact structures 208 of the secondgroup 208B of the first contact structures 208 are formed of and includea second, different conductive material (e.g., Cu).

As previously mentioned, portions of the semiconductive base structure202 (e.g., conductively doped regions serving as source regions anddrain regions, undoped regions serving as channel regions), the gatestructures 204, the first routing structures 206, and the first contactstructures 208 form various control logic devices 218 of the controllogic region 216. In some embodiments, the control logic devices 218comprise complementary metal oxide semiconductor (CMOS) circuitry. Thecontrol logic devices 218 may be configured to control variousoperations of other components (e.g., memory cells) of a microelectronicdevice (e.g., a memory device) to subsequently be formed using theadditional microelectronic device structure 200 and the microelectronicdevice structure 100 (FIG. 1F). As a non-limiting example, the controllogic devices 218 may include one or more (e.g., each) of charge pumps(e.g., V_(CCP) charge pumps, V_(NEGWL) charge pumps, DVC2 charge pumps),delay-locked loop (DLL) circuitry (e.g., ring oscillators), V_(dd)regulators, drivers (e.g., string drivers), page buffers, decoders(e.g., local deck decoders, column decoders, row decoders), senseamplifiers (e.g., equalization (EQ) amplifiers, isolation (ISO)amplifiers, NMOS sense amplifiers (NSAs), PMOS sense amplifiers (PSAs)),repair circuitry (e.g., column repair circuitry, row repair circuitry),I/O devices (e.g., local I/O devices), memory test devices, arraymultiplexers (MUX), error checking and correction (ECC) devices,self-refresh/wear leveling devices, and other chip/deck controlcircuitry.

With continued reference to FIG. 2A, the second contact structures 210of the additional microelectronic device structure 200 may verticallyoverlie and be coupled to some of the first routing structures 206 ofthe control logic region 216. In some embodiments, the second contactstructures 210 comprise conductively filled vias vertically extendingthrough portions of the additional isolation material 214 interposedbetween the additional bond pads 212 and the first routing structures206. The second contact structures 210 may be formed of and includeconductive material. By way of non-limiting example, the second contactstructures 210 may be formed of and include one or more of at least onemetal, at least one alloy, and at least one conductive metal-containingmaterial (e.g., a conductive metal nitride, a conductive metal silicide,a conductive metal carbide, a conductive metal oxide). In someembodiments, each of the second contact structures 210 is formed of andincludes Cu.

The additional bond pads 212 of the additional microelectronic devicestructure 200 may vertically overlie and be coupled to the secondcontact structures 210. The second contact structures 210 may verticallyextend from and between the additional bond pads 212 and some of thefirst routing structures 206. The additional bond pads 212 may beconfigured and positioned for attachment to the bond pads 144 (FIG. 1F)of the microelectronic device structure (FIG. 1F) to form connected bondpads, as described in further detail below. The additional bond pads 212may be formed of and include conductive material. By way of non-limitingexample, the additional bond pads 212 may be formed of and include oneor more of at least one metal, at least one alloy, and at least oneconductive metal-containing material (e.g., a conductive metal nitride,a conductive metal silicide, a conductive metal carbide, a conductivemetal oxide). In some embodiments, each of the additional bond pads 212is formed of and includes Cu.

Still referring to FIG. 2A, the additional isolation material 214 maycover and surround portions of at least the first routing structures206, the second contact structures 210, and the additional bond pads212. The additional isolation material 214 may subsequently be attachedto the isolation material 146 (FIG. 1F) of the microelectronic devicestructure 100 (FIG. 1F) in the process of forming a microelectronicdevice (e.g., a memory device) using the microelectronic devicestructure 100 (FIG. 1F) and the additional microelectronic devicestructure 200, as described in further detail below. A materialcomposition of the additional isolation material 214 may besubstantially the same as a material composition of the isolationmaterial 146 (FIG. 1F), or the material composition of the additionalisolation material 214 may be different than the material composition ofthe isolation material 146 (FIG. 1F). In some embodiments, theadditional isolation material 214 is formed of and includes at least onedielectric oxide material, such as SiO_(x) (e.g., SiO₂). In additionalembodiments, the additional isolation material 214 is formed of andincludes at least one low-k dielectric material, such as one or more ofsilicon oxycarbide (SiO_(x)C_(y)), silicon oxynitride (SiO_(x)N_(y)),hydrogenated silicon oxycarbide (SiC_(x)O_(y)H_(z)), and siliconoxycarbonitride (SiO_(x)C_(z)N_(y))). The additional isolation material214 may be substantially homogeneous, or the additional isolationmaterial 214 may be heterogeneous. In some embodiments, the additionalisolation material 214 is substantially homogeneous. In additionalembodiments, the additional isolation material 214 is heterogeneous. Theadditional isolation material 214 may, for example, be formed of andinclude a stack of at least two different dielectric materials.

Referring to next to FIG. 2B, following the formation of themicroelectronic device structure 100 and the separate formation of theadditional microelectronic device structure 200, the microelectronicdevice structure 100 may be vertically inverted (e.g., flipped upsidedown in the Z-direction) and attached (e.g., bonded) to the additionalmicroelectronic device structure 200 to form a microelectronic devicestructure assembly 220. Alternatively, the additional microelectronicdevice structure 200 may be vertically inverted (e.g., flipped upsidedown in the Z-direction) and attached to the microelectronic devicestructure 100 to form the microelectronic device structure assembly 220.The attachment of the microelectronic device structure 100 to theadditional microelectronic device structure 200 may attach the bond pads144 of the microelectronic device structure 100 to the additional bondpads 212 of the additional microelectronic device structure 200 to formconnected bond pads 222. In addition, the attachment of themicroelectronic device structure 100 to the additional microelectronicdevice structure 200 may also attach the isolation material 146 of themicroelectronic device structure 100 to the additional isolationmaterial 214 of the additional microelectronic device structure 200. Asshown in FIG. 2B, the attachment of the microelectronic device structure100 to the additional microelectronic device structure 200 may form afirst interconnect region 224 of a microelectronic device (e.g., memorydevice, such as a 3D NAND Flash memory device) to subsequently be formedusing the microelectronic device structure assembly 220. In FIG. 2B,vertical boundaries of the microelectronic device structure 100 relativeto the additional microelectronic device structure 200 prior to theattachment of the microelectronic device structure 100 to the additionalmicroelectronic device structure 200 to form the microelectronic devicestructure assembly 220 are depicted by the dashed line A-A. Themicroelectronic device structure 100 may be attached to the additionalmicroelectronic device structure 200 without a bond line.

As shown in FIG. 2B, the connected bond pads 222 of the firstinterconnect region 224 may vertically extend from and between the digitline contact structures 142 of the microelectronic device structure 100and the second contact structures 210 of the additional microelectronicdevice structure 200. The additional bond pads 212 of the connected bondpads 222 may vertically extend from and between the second contactstructures 210 and the bond pads 144 of the connected bond pads 222; andthe bond pads 144 of the connected bond pads 222 may vertically extendfrom and between the digit line contact structures 142 and theadditional bond pads 212 of the connected bond pads 222. While in FIG.2B, the additional bond pad 212 and the bond pad 144 of each connectedbond pad 222 are distinguished from one another by way of a dashed line,the additional bond pad 212 and the bond pad 144 may be integral andcontinuous with one another. Put another way, each connected bond pad222 may be a substantially monolithic structure including the additionalbond pad 212 as a first region thereof, and the bond pad 144 as a secondregion thereof. For each connected bond pad 222, the additional bond pad212 thereof may be attached to the bond pad 144 thereof without a bondline.

Referring next to FIG. 2C, after attaching the microelectronic devicestructure 100 (FIG. 2B) to the additional microelectronic devicestructure 200, the base structure 102 (FIG. 2B) and portions of thesemiconductive structures 115 may be removed (e.g., through conventionaldetachment processes and/or conventional grinding processes). Thematerial removal process may expose (e.g., uncover) the dopedsemiconductive material 104 and remaining portions of the semiconductivestructures 115. As shown in FIG. 2C, an upper surface of the dopedsemiconductive material 104 may be substantially coplanar with uppersurfaces of remaining portions of the semiconductive structures 115. Theupper surfaces of the doped semiconductive material 104 and theremaining portions of the semiconductive structures 115 may verticallyoverlie upper surfaces of the cell pillar structures 116. In addition,optionally, an additional amount (e.g., additional volume) of dopedsemiconductive material (e.g., doped polycrystalline silicon) may beformed on the doped semiconductive material 104 and the remainingportions of the semiconductive structures 115 following the removal ofthe base structure 102 (FIG. 2B) and the portions of the semiconductivestructures 115. If formed, the additional amount of doped semiconductivematerial may have substantially the same material composition as that ofthe doped semiconductive material 104, or may have a different materialcomposition than that of the doped semiconductive material 104. Inaddition, optionally, a strapping material 226 may optionally be formedon or over the doped semiconductive material 104 and the remainingportions of the semiconductive structures 115. The doped semiconductivematerial 104 (and the additional amount of doped semiconductivematerial, if any) may, optionally, be annealed (e.g., thermallyannealed) before and/or after the formation of the strapping material226 (if any). Annealing the doped semiconductive material 104 (and theadditional amount of doped semiconductive material, if any) may, forexample, facilitate or enhance dopant activation within the dopedsemiconductive material 104 (and the additional amount of dopedsemiconductive material, if any).

If formed, the strapping material 226 may be formed of and includeconductive material. By way of non-limiting example, the strappingmaterial 226 (if any) may be formed of and include a metallic materialcomprising one or more of at least one metal, at least one alloy, and atleast one conductive metal-containing material (e.g., a conductive metalnitride, a conductive metal silicide, a conductive metal carbide, aconductive metal oxide). In some embodiments, the strapping material 226is formed of and includes tungsten silicide (WSi_(x)). In additionalembodiments, the strapping material 226 is formed of and include one ormore of (e.g., a stack of) W and tungsten nitride (WN_(x)).

Referring next to FIG. 2D, following the removal of the base structure102 (FIG. 2B), regions of the doped semiconductive material 104 (and theadditional amount of doped semiconductive material, if any) (FIG. 2C)and the strapping material 226 (FIG. 2C) (if any) may be removed (e.g.,etched) to form one or more source structures 228 and one or morecontact pads 230 from the doped semiconductive material 104 (FIG. 2C),and to from strapping structures 232 from the strapping material 226(FIG. 2C) (if any). As shown in FIG. 2D, the formation of the sourcestructure(s) 228 and the contact pad(s) 230 may form a memory arrayregion 237 of a microelectronic device (e.g., memory device) tosubsequently be formed using the microelectronic device structureassembly 220. The memory array region 237 may include the stackstructure 126; the cell pillar structures 116; the deep contactstructures 134; the digit line structures 139; the insulative linestructures 140; portions (e.g., the second portions 142B (FIG. 1F)) ofthe digit line contact structures 142; and a source tier 235 includingthe source structure(s) 228, the contact pad(s) 230, and the strappingstructures 232 (if any).

Within the source tier 235 of the memory array region 237, the sourcestructure(s) 228 and the contact pad(s) 230 may horizontally neighborone another (e.g., in the X-direction, in the Y-direction). The sourcestructure(s) 228 may be electrically isolated from the contact pad(s)230, and may be positioned at substantially the same vertical position(e.g., in the Z-direction) as the contact pad(s) 230. The sourcestructure(s) 228 may be coupled to the vertically extending strings ofmemory cells 138. The contact pad(s) 230 may be coupled to additionalconductive features within the stack structure 126, such as one or moreof the deep contact structures 134.

The processing acts described above with respect to FIGS. 1A through 1Fand FIGS. 2A through 2C effectuate the formation of the sourcestructure(s) 228, the contact pad(s) 230, and the strapping structures232 (if any) after (e.g., subsequent to, following) the formation ofother features of the memory array region 237, and after the attachmentof the microelectronic device structure 100 (FIG. 2B) to the additionalmicroelectronic device structure 200.

Referring next to FIG. 2E, third contact structures 234 may be formedover and in electrical communication with the source structure(s) 228and the contact pad(s) 230, and second routing structures 236 may beformed over and in electrical communication with the third contactstructures 234. The third contact structures 234 may be formed to extendbetween the second routing structures 236 and the source structure(s)228 and the contact pad(s) 230 of the source tier 235. If present, thestrapping structures 232 may vertically intervene between the thirdcontact structures 234 and the source structure(s) 228 and the contactpad(s) 230. The third contact structures 234 may, for example, be formedon upper surfaces of the strapping structures 232. In addition, as shownin FIG. 2E, at least one insulative material 238 may be formed to coverand surround the third contact structures 234 and the second routingstructures 236. The at least one insulative material 238 may also beformed to cover and surround portions of the source structure(s) 228 andthe contact pad(s) 230.

The third contact structures 234 and the second routing structures 236may each be formed of and include conductive material. By way ofnon-limiting example, the third contact structures 234 and the secondrouting structures 236 may each individually be formed of and includeone or more of at least one metal, at least one alloy, and at least oneconductive metal-containing material (e.g., a conductive metal nitride,a conductive metal silicide, a conductive metal carbide, a conductivemetal oxide). In some embodiments, the third contact structures 234 andthe second routing structures 236 are each formed of and include Cu. Inadditional embodiments, the third contact structures 234 are formed ofand include W, and the second routing structures 236 are formed of andinclude Cu.

Still referring to FIG. 2E, in some embodiments, the insulative material238 is formed of and includes at least one dielectric oxide material,such as SiO_(x) (e.g., SiO₂). In additional embodiments, the insulativematerial 238 is formed of and includes at least one low-k dielectricmaterial, such as one or more of SiO_(x)C_(y), SiO_(x)N_(y),SiC_(x)O_(y)H_(z), and SiO_(x)C_(z)N_(y). The insulative material 238may be substantially homogeneous, or the insulative material 238 may beheterogeneous. If the insulative material 238 is heterogeneous, amountsof one or more elements included in the insulative material 238 may varystepwise (e.g., change abruptly), or may vary continuously (e.g., changeprogressively, such as linearly, parabolically) throughout differentportions of the insulative material 238. In some embodiments, theinsulative material 238 is substantially homogeneous. In additionalembodiments, the insulative material 238 is heterogeneous. Theinsulative material 238, for example, be formed of and include a stackof at least two different dielectric materials.

In additional embodiments, one or more capacitors (e.g., one or moremetal-insulator-metal (MIM) capacitors; one or moremetal-insulator-semiconductor (MIS) capacitors) may be formed at theprocessing stage described above with reference to FIG. 2E. By way ofnon-limiting example, FIGS. 2F and 2G are simplified, partialcross-sectional views illustrating embodiments of the disclosure whereincapacitors are formed over the source tier 235 previously described withreference to FIG. 2D. FIG. 2F shows an embodiment of the disclosurewherein one or more MIM capacitors are formed over the source tier 235.FIG. 2G shows an embodiment of the disclosure wherein one or more MIScapacitors are formed over the source tier 235.

Referring to FIG. 2F, in some embodiments, one or more MIM capacitors240 are formed over the source tier 235. An individual MIM capacitor 240may include a portion of an individual strapping structure 232, aninsulative structure 242 on or over the strapping structure 232, and anindividual third contact structure 234 on or over the insulativestructure 242. The portion of the strapping structure 232 may serve afirst metal structure of the MIM capacitor 240, the third contactstructure 234 may serve as a second metal structure of the MIM capacitor240, and the insulative structure 242 may intervene between thestrapping structure 232 and the third contact structure 234. As shown inFIG. 2F, for an individual MIM capacitor 240, the insulative structure242 thereof may be positioned directly adjacent a lower surface and sidesurfaces of the third contact structure 234. The insulative structure242 may be interposed between the lower surface of the third contactstructure 234 and an upper surface of a strapping structure 232associated with the MIM capacitor 240, and may also be interposedbetween the side surfaces of the third contact structure 234 and sidesurfaces of the insulative material 238 horizontally surrounding thethird contact structures 234. In additional embodiments, a metallicstructure (e.g., a metal structure, an alloy structure) is formedbetween the strapping structure 232 and the insulative structure 242,and serves as the first metal structure of the MIM capacitor 240.

The insulative structure 242 of an individual MIM capacitor 240 may beformed of and include insulative material. For example, the insulativestructure 242 may be formed of and include at least one dielectric oxidematerial, such as one or more of SiO_(x); phosphosilicate glass;borosilicate glass; borophosphosilicate glass; fluorosilicate glass;AlO_(x); and a high-k oxide, such one or more of HfO_(x), NbO_(x), andTiO_(x). In some embodiments, the insulative structure 242 is formed ofand includes at least one high-k oxide (e.g., one or more of HfO_(x),NbO_(x), and TiO_(x)). In additional embodiments, the insulativestructure 242 is formed of and includes SiO_(x) (e.g., SiO₂).

The MIM capacitor(s) 240 may be formed using conventional processes(e.g., conventional material deposition processes, conventional materialremoval processes, such as conventional etching processes) andconventional processing equipment, which are not described in detailherein. One or more masks (e.g., one or more i-line masks) may beemployed to protect insulative material (e.g., high-k oxide) of theinsulative structure(s) 242 during patterning and etching processesemployed to form the MIM capacitor(s) 240.

Referring next to FIG. 2G, in additional embodiments, one or more MIScapacitors 244 are formed over the source tier 235. An individual MIScapacitor 244 may include a portion of an individual source structure228, an insulative structure 246 on or over the source structure 228,and a metallic structure 248 on or over the insulative structure 246.The metallic structure 248 may serve as a metal structure of the MIScapacitor 244, the portion of the source structure 228 may serve asemiconductive structure (e.g., a conductively doped semiconductivestructure) of the MIS capacitor 244, and the insulative structure 246may intervene between the source structure 228 and the metallicstructure 248. As shown in FIG. 2G, for an individual MIS capacitor 244,the insulative structure 246 thereof may be interposed between a lowersurface of the metallic structure 248 and an upper surface of the sourcestructure 228 associated with the MIS capacitor 244. As shown in FIG.2G, the strapping structure 232 (FIG. 2E) may not be positionedvertically between and in contact with the source structure 228 and theinsulative structure 246 of the MIS capacitor 244. In some suchembodiments, the strapping structures 232 are omitted (e.g., absent)from upper surfaces of the source structure(s) 228 and the contactpad(s) 230 of the source tier 235. In additional embodiments, strappingstructures 232 are formed over portions of the upper surfaces of thesource structure(s) 228 and the contact pad(s) 230 outside of horizontalboundaries of the MIS capacitor(s) 244, but are omitted from otherportions of upper surfaces of the source structure(s) 228 withinhorizontal boundaries the MIS capacitor(s) 244.

The insulative structure 246 of an individual MIS capacitor 244 may beformed of and include insulative material. For example, the insulativestructure 246 may be formed of and include at least one dielectric oxidematerial, such as one or more of SiO_(x); phosphosilicate glass;borosilicate glass; borophosphosilicate glass; fluorosilicate glass;AlO_(x); and a high-k oxide, such one or more of HfO_(x), NbO_(x), andTiO_(x). In some embodiments, the insulative structure 246 is formed ofand includes at least one high-k oxide (e.g., one or more of HfO_(x),NbO_(x), and TiO_(x)). In additional embodiments, the insulativestructure 246 is formed of and includes SiO_(x) (e.g., SiO₂).

Still referring to FIG. 2G, the metallic structure 248 of an individualMIS capacitor 244 may be formed of and include a metallic materialcomprising one or more of at least one metal, at least one alloy, and atleast one conductive metal-containing material (e.g., a conductive metalnitride, a conductive metal silicide, a conductive metal carbide, aconductive metal oxide). In some embodiments, the metallic structure 248of one or more MIS capacitors 244 is formed of and includes W.

The MIS capacitor(s) 244 may be formed using conventional processes(e.g., conventional material deposition processes, conventional materialremoval processes, such as conventional etching processes) andconventional processing equipment, which are not described in detailherein. One or more masks (e.g., one or more i-line masks) may beemployed to protect insulative material (e.g., high-k oxide) of theinsulative structure(s) 246 during patterning and etching processesemployed to form the MIS capacitor(s) 244.

With returned reference to FIG. 2E, following the formation of thesecond routing structures 236, the microelectronic device structureassembly 220 may be subjected to additional processing to coupleadditional features to the second routing structures 236. For example,referring to FIG. 2H, fourth contact structures 250 may be formed overand in electrical communication with the second routing structures 236,and conductive pads 252 may be formed over and in electricalcommunication with the fourth contact structures 250. The fourth contactstructures 250 may be formed to extend between the second routingstructures 236 and the conductive pads 252. The fourth contactstructures 250 may, for example, be formed on upper surfaces of thesecond routing structures 236, and the conductive pads 252 may be formedon upper surfaces of the fourth contact structures 250. In addition, asshown in FIG. 2H, at least one additional insulative material 254 may beformed to cover and surround the fourth contact structures 250 and theconductive pads 252. The at least one additional insulative material 254may also be formed to cover and surround portions of the second routingstructures 236 and the insulative material 238.

The fourth contact structures 250 and the conductive pads 252 may eachbe formed of and include conductive material. By way of non-limitingexample, the fourth contact structures 250 and the conductive pads 252may each individually be formed of and include one or more of at leastone metal, at least one alloy, and at least one conductivemetal-containing material (e.g., a conductive metal nitride, aconductive metal silicide, a conductive metal carbide, a conductivemetal oxide). In some embodiments, the fourth contact structures 250 areformed of and include W, and the conductive pads 252 are formed of andinclude Al.

Still referring to FIG. 2H, a material composition of the additionalinsulative material 254 may be substantially the same as a materialcomposition of the insulative material 238, or a material composition ofthe additional insulative material 254 may be different than a materialcomposition of the insulative material 238. In some embodiments, theadditional insulative material 254 is formed of and includes at leastone dielectric oxide material, such as SiO_(x) (e.g., SiO₂). Inadditional embodiments, the additional insulative material 254 is formedof and includes at least one low-k dielectric material, such as one ormore of SiO_(x)C_(y), SiO_(x)N_(y), SiC_(x)O_(y)H_(z), andSiO_(x)C_(z)N_(y). The additional insulative material 254 may besubstantially homogeneous, or the additional insulative material 254 maybe heterogeneous. If the additional insulative material 254 isheterogeneous, amounts of one or more elements included in theadditional insulative material 254 may vary stepwise (e.g., changeabruptly), or may vary continuously (e.g., change progressively, such aslinearly, parabolically) throughout different portions of the additionalinsulative material 254. In some embodiments, the additional insulativematerial 254 is substantially homogeneous. In additional embodiments,the additional insulative material 254 is heterogeneous. The additionalinsulative material 254, for example, be formed of and include a stackof at least two different dielectric materials.

As shown in FIG. 2H, the formation of the fourth contact structures 250,the conductive pads 252, and the additional insulative material 254 mayform a second interconnect region 256. The second interconnect region256 may include the third contact structures 234, the second routingstructures 236, the insulative material 238, the fourth contactstructures 250, the conductive pads 252, and the additional insulativematerial 254. In addition, the formation of the second interconnectregion 256 may effectuate the formation of a microelectronic device 258(e.g., a memory device, such as a 3D NAND Flash memory device). Themicroelectronic device 258 may include the control logic region 216, thefirst interconnect region 224, the memory array region 237, and thesecond interconnect region 256. At least the second routing structures236 and the conductive pads 252 of the second interconnect region 256may serve as global routing structures for the microelectronic device258. The second routing structures 236 and the conductive pads 252 may,for example, be configured to receive global signals from an externalbus, and to relay the global signals to other components (e.g.,structures, devices) of the microelectronic device 258.

Thus, in accordance with embodiments of the disclosure, a method offorming a microelectronic device comprises forming a microelectronicdevice structure. The microelectronic device structure comprises a basestructure; a doped semiconductive material overlying the base structure;a stack structure overlying the doped semiconductive material andcomprising a vertically alternating sequence of conductive structuresand insulative structures; semiconductive structures verticallyextending from locations within the base structure, through the dopedsemiconductive structure, and into a lower portion of the stackstructure; cell pillar structures vertically overlying and horizontallyaligned with the semiconductive structures, the cell pillar structuresvertically extending through an upper portion of the stack structure;and digit line structures vertically overlying the stack structure. Anadditional microelectronic device structure comprising control logicdevices is formed. The microelectronic device structure is attached tothe additional microelectronic device structure to form amicroelectronic device structure assembly. The digit line structures arevertically interposed between the stack structure and the control logicdevices within the microelectronic device structure assembly. The basestructure and portions of the semiconductive structures are removed toexpose the doped semiconductive material and additional portions of thesemiconductive structures. The doped semiconductive material ispatterned after removing the base structure and the portions of thesemiconductive structures to form at least one source structure over thestack structure and coupled to the cell pillar structures.

Furthermore, in accordance with embodiments of the disclosure, amicroelectronic device comprises a memory array region, a control logicregion, a first interconnect region, and a second interconnect region.The memory array region comprises a stack structure comprising avertically alternating sequence of conductive structures and insulatingstructures; a source structure vertically overlying the stack structureand comprising a doped semiconductive material; semiconductivestructures vertically extending through the source structure and into anupper portion of the stack structure; cell pillar structures verticallyunderlying and horizontally aligned with the semiconductive structures,the cell pillar structures vertically extending through a lower portionof the stack structure; and digit line structures vertically underlyingthe stack structure and in electrical communication with the cell pillarstructures. The control logic region comprises control logic devices.The first interconnect region is vertically interposed between thememory array region and the control logic region and comprisesadditional conductive structures coupling the digit line structures ofthe memory array region to the control logic devices of the controllogic region. The second interconnect region vertically overlies thememory array region and comprises further conductive structures inelectrical communication with the source structure.

Microelectronic devices (e.g., microelectronic device 258 (FIG. 2H)) inaccordance with embodiments of the disclosure may be used in embodimentsof electronic systems of the disclosure. For example, FIG. 3 is a blockdiagram of an illustrative electronic system 300 according toembodiments of disclosure. The electronic system 300 may comprise, forexample, a computer or computer hardware component, a server or othernetworking hardware component, a cellular telephone, a digital camera, apersonal digital assistant (PDA), portable media (e.g., music) player, aWi-Fi or cellular-enabled tablet such as, for example, an iPad® orSURFACE® tablet, an electronic book, a navigation device, etc. Theelectronic system 300 includes at least one memory device 302. Thememory device 302 may comprise, for example, a microelectronic device(e.g., the microelectronic device 258 (FIG. 2H)) previously describedherein. The electronic system 300 may further include at least oneelectronic signal processor device 304 (often referred to as a“microprocessor”). The electronic signal processor device 304 may,optionally, include a microelectronic device (e.g., the microelectronicdevice 258 (FIG. 2H)) previously described herein. While the memorydevice 302 and the electronic signal processor device 304 are depictedas two (2) separate devices in FIG. 2A, in additional embodiments, asingle (e.g., only one) memory/processor device having thefunctionalities of the memory device 302 and the electronic signalprocessor device 304 is included in the electronic system 300. In suchembodiments, the memory/processor device may include a microelectronicdevice (e.g., the microelectronic device 258 (FIG. 2H)) previouslydescribed herein. The electronic system 300 may further include one ormore input devices 306 for inputting information into the electronicsystem 300 by a user, such as, for example, a mouse or other pointingdevice, a keyboard, a touchpad, a button, or a control panel. Theelectronic system 300 may further include one or more output devices 308for outputting information (e.g., visual or audio output) to a user suchas, for example, a monitor, a display, a printer, an audio output jack,a speaker, etc. In some embodiments, the input device 306 and the outputdevice 308 may comprise a single touchscreen device that can be usedboth to input information to the electronic system 300 and to outputvisual information to a user. The input device 306 and the output device308 may communicate electrically with one or more of the memory device302 and the electronic signal processor device 304.

Thus, in accordance with embodiments of the disclosure, an electronicsystem comprises an input device, an output device, a processor deviceoperably coupled to the input device and the output device, and a memorydevice operably coupled to the processor device. The memory devicecomprises a stack structure, a source structure, digit line structures,semiconductive structures, cell pillar structures, conductive routingstructures, control logic devices, and additional conductive routingstructures. The stack structure comprises tiers each comprising aconductive structure and an insulative structure vertically neighboringthe conductive structure. The source structure overlies the stackstructure. The digit line structures underlie the stack structure. Thesemiconductive structures vertically extend through the source structureand at least an uppermost tier of the tiers of the stack structure. Thecell pillar structures are coupled to the semiconductive structures andthe digit line structures and vertically extend through at least oneadditional tier of the tiers of the stack structure verticallyunderlying the uppermost tier. The conductive routing structuresvertically underlie and are coupled to the digit line structures. Thecontrol logic devices are coupled to and at least partially verticallyunderlie the conductive routing structures. The additional conductiverouting structures are coupled to and vertically overlie the sourcestructure.

The structures, devices, and methods of the disclosure advantageouslyfacilitate one or more of improved microelectronic device performance,reduced costs (e.g., manufacturing costs, material costs), increasedminiaturization of components, and greater packaging density as comparedto conventional structures, conventional devices, and conventionalmethods. The structures, devices, and methods of the disclosure may alsoimprove scalability, efficiency, and simplicity as compared toconventional structures, conventional devices, and conventional methods.

While the disclosure is susceptible to various modifications andalternative forms, specific embodiments have been shown by way ofexample in the drawings and have been described in detail herein.However, the disclosure is not limited to the particular formsdisclosed. Rather, the disclosure is to cover all modifications,equivalents, and alternatives falling within the scope of the followingappended claims and their legal equivalent. For example, elements andfeatures disclosed in relation to one embodiment may be combined withelements and features disclosed in relation to other embodiments of thedisclosure.

What is claimed is:
 1. A method of forming a microelectronic device,comprising: forming a microelectronic device structure comprising: abase structure; a doped semiconductive material overlying the basestructure; a stack structure overlying the doped semiconductive materialand comprising a vertically alternating sequence of conductivestructures and insulative structures; semiconductive structuresvertically extending from locations within the base structure, throughthe doped semiconductive material, and into a lower portion of the stackstructure; cell pillar structures vertically overlying and horizontallyaligned with the semiconductive structures, the cell pillar structuresvertically extending through an upper portion of the stack structure;and digit line structures vertically overlying the stack structure;forming an additional microelectronic device structure comprisingcontrol logic devices; attaching the microelectronic device structure tothe additional microelectronic device structure to form amicroelectronic device structure assembly, the digit line structuresvertically interposed between the stack structure and the control logicdevices within the microelectronic device structure assembly; removingthe base structure and portions of the semiconductive structures toexpose the doped semiconductive material and additional portions of thesemiconductive structures; and patterning the doped semiconductivematerial after removing the base structure and the portions of thesemiconductive structures to form at least one source structure over thestack structure and coupled to the cell pillar structures.
 2. The methodof claim 1, wherein forming a microelectronic device structurecomprises: forming a preliminary stack structure over the dopedsemiconductive material, the preliminary stack structure comprising avertically alternating sequence of first insulative structures andsecond insulative structures; forming openings vertically extendingthrough the preliminary stack structure and the doped semiconductivematerial and into the base structure; filling lower portions of theopenings positioned within the base structure, the doped semiconductivematerial, and the lower portion of the stack structure with epitaxialsemiconductive material; forming the cell pillar structures over theepitaxial semiconductive material and within remaining, upper portionsof the openings; forming slots extending through the preliminary stackstructure; at least partially replacing the second insulative structureswith the conductive structures using the slots to form the stackstructure, the insulative structures of the stack structure comprisingremaining portions of the first insulative structures; and forming thedigit line structures over and in electrical communication with the cellpillar structures.
 3. The method of claim 2, further comprising formingadditional doped semiconductive material between the epitaxialsemiconductive material and the cell pillar structures within theopenings.
 4. The method of claim 2, further comprising forming a gatedielectric material around the conductive structures, the gatedielectric material interposed between a first conductive structure ofthe conductive structures and the epitaxial semiconductive materialwithin the lower portion of the stack structure.
 5. The method of claim4, further comprising selecting the gate dielectric material to comprisea dielectric oxide material.
 6. The method of claim 1, wherein forming amicroelectronic device structure comprises forming the microelectronicdevice structure to further comprise metal-oxide-semiconductor (MOS)select devices within the lower portion of the stack structure.
 7. Themethod of claim 1, wherein forming a microelectronic device structurecomprises forming the microelectronic device structure to furthercomprise conductive contact structures vertically extending through thestack structure and into the doped semiconductive material.
 8. Themethod of claim 1, wherein forming a microelectronic device structurecomprises forming the microelectronic device structure to furthercomprise: insulative line structures on the digit line structures; digitline contact structures extending through portions of the insulativeline structures and contacting the digit line structures; and conductivepad structures on the digit line contact structures.
 9. The method ofclaim 8, wherein forming an additional microelectronic device structurecomprises forming the microelectronic device structure to furthercomprise additional conductive pad structures over the control logicdevices.
 10. The method of claim 9, wherein attaching themicroelectronic device structure to the additional microelectronicdevice structure comprises: vertically inverting one of themicroelectronic device structure and the additional microelectronicdevice structure; and bonding the conductive pad structures of themicroelectronic device structure to the additional conductive padstructures of the additional microelectronic device structure.
 11. Themethod of claim 1, further comprising: forming conductive routingstructures over and in electrical communication with the at least onesource structure; and forming conductive pad structures over and inelectrical communication with the conductive routing structures.
 12. Themethod of claim 11, further comprising forming, vertically over the atleast one the source structure and vertically under the conductiverouting structures, one or more of at least one metal-insulator-metal(MIM) capacitor and at least one metal-insulator-semiconductor (MIS)capacitor.
 13. A microelectronic device, comprising: a memory arrayregion comprising: a stack structure comprising a vertically alternatingsequence of conductive structures and insulating structures; a sourcestructure vertically overlying the stack structure and comprising adoped semiconductive material; semiconductive structures verticallyextending through the source structure and into an upper portion of thestack structure; cell pillar structures vertically underlying andhorizontally aligned with the semiconductive structures, the cell pillarstructures vertically extending through a lower portion of the stackstructure; and digit line structures vertically underlying the stackstructure and in electrical communication with the cell pillarstructures; a control logic region comprising control logic devices; afirst interconnect region vertically interposed between the memory arrayregion and the control logic region and comprising additional conductivestructures coupling the digit line structures of the memory array regionto the control logic devices of the control logic region; and a secondinterconnect region vertically overlying the memory array region andcomprising further conductive structures in electrical communicationwith the source structure.
 14. The microelectronic device of claim 13,further comprising metal-oxide-semiconductor (MOS) select devices withinthe upper portion of the stack structure.
 15. The microelectronic deviceof claim 13, wherein the semiconductive structures comprise epitaxialsemiconductive material.
 16. The microelectronic device of claim 13,further comprising: additional doped semiconductive material verticallyinterposed between the semiconductive structures and the cell pillarstructures; and gate dielectric material horizontally interposed betweensemiconductive structures and one or more of the conductive structures.17. The microelectronic device of claim 13, wherein the furtherconductive structures comprise: conductive routing structures over thesource structure; conductive contacts extending between and coupling theconductive routing structures and the source structure; conductive padstructures over the conductive routing structures; and additionalconductive contacts extending between and coupling the conductiverouting structures and the conductive pad structures.
 18. Themicroelectronic device of claim 13, further comprising ametal-insulator-metal (MIM) capacitor at least partially positionedvertically between the source structure and the further conductivestructures.
 19. The microelectronic device of claim 13, furthercomprising a metal-insulator-semiconductor (MIS) capacitor at leastpartially positioned vertically between the source structure and thefurther conductive structures.
 20. An electronic system, comprising: aninput device; an output device; a processor device operably coupled tothe input device and the output device; and a memory device operablycoupled to the processor device and comprising: a stack structurecomprising tiers each comprising a conductive structure and aninsulative structure vertically neighboring the conductive structure; asource structure overlying the stack structure; digit line structuresunderlying the stack structure; semiconductive structures verticallyextending through the source structure and at least an uppermost tier ofthe tiers of the stack structure; cell pillar structures coupled to thesemiconductive structures and the digit line structures and verticallyextending through at least one additional tier of the tiers of the stackstructure vertically underlying the uppermost tier; conductive routingstructures vertically underlying and coupled to the digit linestructures; control logic devices coupled to and at least partiallyvertically underlying the conductive routing structures; and additionalconductive routing structures coupled to and vertically overlying thesource structure.